6” stainless steel chuck with vacuum
switch separately
z For wafer 6” and less
z Coaxial chuck XY stage
z Linear backlash free travel 6”-6”
z Fine position – 10 micron resolution
z Quick motion -25 mm drive per knob
resolution
z Chuck theta 15 degree backlash free
z Rectangular inner shaped platen with hard
chrome plated
z Chuck up/down 6 mm